Viscous fluid transfer apparatus and transfer method, electronic component mounting apparatus and mounting method, and semiconductor device

A viscous fluid transfer apparatus for forming a flat viscous fluid transfer surface for transferring viscous fluid to a connecting terminal of an electronic component, said viscous fluid transfer apparatus comprising:

• a transfer unit including a planar pan surface for putting a viscous fluid thereon;
• a squeegee unit including a stirring squeegee shaped planar for stirring said viscous fluid put on said pan surface, a leveling squeegee shaped planer for uniformly flattening said viscous fluid which is stirred, and a squeegee fixing member serving to separate said stirring squeegee and said leveling squeegee from each other and to fix them in parallel, wherein both ends of said fixing member are supported pivotally and rockably above said transfer unit;
• a transfer unit moving mechanism for reciprocating said transfer unit such that said stirring squeegee and said leveling squeegee are relatively moved each other along said planar pan surface of said transfer unit;
• and
• a squeegee driving mechanism for rocking said squeegee unit such that said stirring squeegee approaches said pan surface on going path of said stirring squeegee and said leveling squeegee approaches said pan surface on returning path of said leveling squeegee.