In-situ wear indicator for non-selective material removal systems
AssigneeInternational Business Machiens Corporation
InventorsGregory S. Boettcher, Steven B. Gold, Robert P. Katz, Gabriel V. Moore
Life of this patent
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Abstract
An in-situ wear indicator for detecting wear to at least one selected part in a semiconductor manufacturing environment. The indicator is manufactured in a selected material with a selected thickness so that the indicator degrades upon exposure to the semiconductor manufacturing process at a fixed rate relative to the wear of the selected part. The indicator displays a visual indication of wear which is discernible by an automated detection device.
Claims20
An indicator for detecting wear to at least one selected part in a semiconductor manufacturing environment, the indicator comprising:
- a selected material having a selected thickness;
- wherein said indicator degrades upon exposure to the semiconductor manufacturing environment at a fixed rate relative to the wear of the selected part;
- and
- wherein the indicator displays a visual indication of wear of the selected part, said
- visual indication being discernible by an automated detection device.
A method for detecting wear to at least one selected part in a semiconductor manufacturing environment, the method comprising:
- providing an apparatus for processing a product comprising the at least one selected part;
- providing a wear indicator comprising a selected material having a selected thickness;
- exposing said wear indicator to the semiconductor manufacturing environment which degrades said wear indicator at a fixed rate relative to the wear of the selected part of said apparatus;
- and
- calculating the amount of wear to the selected part of said apparatus by examining said wear indicator with an automated detection device.
An indicator for detecting wear to at least one selected part in a non-selective material removal system, the indicator comprising:
- a selected material having selected thickness;
- wherein said indicator degrades upon exposure to the non-selective material removal system at a fixed rate relative to the wear of the selected part;
- and
- wherein the indicator displays a visual indication of wear to the selected part, said visual indication being discernible by an automated detection device.
A method for detecting wear to at least one selected part in a non-selective material removal system, the method comprising:
- providing an apparatus for processing a product comprising the at least one selected part;
- providing a wear indicator, comprising a selected material having a selected thickness;
- exposing said wear indicator to a non-selective material removal environment which erodes said wear indicator at a fixed rate relative to the wear of the selected parts of said apparatus;
- calculating the amount of wear to the selected part of said apparatus by examining said wear indicator with an automated detection device.
Dependencies are inferred from the claim text.