Semiconductor device and manufacturing method therefor
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
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Abstract
A light weight and a low cost EL display device is provided, in which light emitting elements are formed on a flexible film. A thin metallic substrate is used as an element forming substrate with the present invention, edge portions of the metallic substrate are bent, and the metallic substrate is attached with good adhesion, within a vacuum, to a substrate holder which possesses curvature in its edge portions. After then forming light emitting elements on the thin metallic substrate, the substrate holder is separated.
Claims27
A light emitting device comprising:
- a substrate having a metallic surface;
- a first insulating film over the substrate having the metallic surface;
- at least one thin film transistor over the first insulating film;
- a second insulating film over the at least one thin film transistor;
- a light shielding film over the second insulating film;
- and
- a light emitting element over the light shielding film;
- said light emitting element including:
- an anode;
- a cathode;
- and
- an EL material interposed between the anode and the cathode;
- and
- wherein a thickness of the substrate having the metallic surface is in a range of 5 to 30 μm, and
- wherein the light shielding film is made of a resin film.
A light emitting device comprising:
- a metal substrate;
- an insulating film over a first surface of the metal substrate;
- a light emitting element over the insulating film;
- said light emitting element including:
- an anode;
- a cathode;
- and
- an EL material interposed between the anode and the cathode, and
- a substrate holder under a majority of a surface of the metal substrate opposite the first surface,
- wherein the substrate holder is made of stainless steel, ceramic or alumina.
A light emitting device comprising:
- a substrate holder;
- a metal substrate over the entire surface of the substrate holder;
- an insulating film over the metal substrate;
- and
- a light emitting element over the insulating film;
- said light emitting element including:
- an anode;
- a cathode;
- and
- an EL material interposed between the anode and the cathode;
- and
- a light shielding film provided between the light emitting element and the metal substrate and overlapped with the light emitting element,
- wherein the substrate holder is made of stainless steel, ceramic or alumina.
A light emitting device comprising:
- a metal substrate;
- a first insulating film over a first surface of the metal substrate;
- at least one thin film transistor over the first insulating film;
- a second insulating film over the at least one thin film transistor;
- a first electrode over the second insulating film wherein the first electrode is electrically connected with the thin film transistor;
- a light emitting layer over the first electrode;
- a second electrode over the light emitting layer;
- and
- a substrate holder under a majority of a surface of the metal substrate opposite the first surface,
- wherein the substrate holder is made of stainless steel, ceramic or alumina.
Dependencies are inferred from the claim text.