Wafer carrier door and latching mechanism with c-shaped cam follower
AssigneeEntegris, Inc.
InventorShawn D. Eggum
Life of this patent
Estimating the term…
Abstract
A wafer container, and methods of constructing a wafer container. The wafer container has an enclosure portion with at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front. The door includes a door chassis with at least a first latching mechanism. The latching mechanism has a rotatable cam member and at least one latching arm. The latching arm has a bifurcate cam follower portion that engages with the periphery of the cam member.
Claims14
A wafer container for holding semiconductor wafers, the container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, and an open front;
- a pair of wafer supports in the enclosure portion, the wafer supports defining a plurality of slots, each slot adapted to receive a wafer;
- and
- a door to close the open front of the enclosure portion, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism on said door chassis, said first latching mechanism including:
- a rotatable cam member having a first surface, an opposed second surface, and a periphery, the first surface having a first raised lip portion at the periphery, the second surface having a recessed portion inward of the periphery;
- and
- at least a first latching arm having a bifurcate cam follower portion with a pair of branches, the bifurcate cam follower portion being slidingly engaged with the periphery of the cam member at the bifurcation of the branches, a first branch of said pair of branches engaged with the first raised lip portion, and a second branch of said pair of branches engaged with the recessed portion.
A wafer container for holding semiconductor wafers, the container including an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, at least one wafer support, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism on said door chassis, said first latching mechanism including:
- a rotatable cam member having a first surface, an opposed second surface, and a periphery, the first surface having a first raised lip portion at the periphery, the second surface having a second raised lip portion at the periphery;
- and
- at least a first latching arm having a bifurcate cam follower portion with a pair of branches, the bifurcate cam follower portion being slidingly engaged with the periphery of the cam member at the bifurcation of the branches, a first branch of said pair of branches engaged with the first raised lip portion, and a second branch of said pair of branches engaged with the second raised lip portion.
A wafer container for holding semiconductor wafers, the container including an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, at least one wafer support, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism on said door chassis, said first latching mechanism comprising:
- a rotatable cam member having a first surface, an opposed second surface, and a periphery, the first surface having a raised lip portion at the periphery;
- and
- at least a first latching arm having a bifurcate cam follower portion with a pair of branches, the bifurcate cam follower portion being slidingly engaged with the periphery of the cam member at the bifurcation of the branches, a first branch of said pair of branches engaged with the raised lip portion, and a second branch of said pair of branches slidingly engaged with the second surface.
A wafer container for holding semiconductor wafers, the container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, an open front, a pair of wafer supports in the enclosure portion, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism on said door chassis, said first latching mechanism comprising:
- a rotatable cam member having a periphery and a raised lip portion at the periphery;
- and
- at least a first latching arm, said first latching arm having a bifurcate cam follower portion with a pair of spaced apart branches adapted to be continually engaged around at least a portion of the periphery of said cam member, at least one of the branches engaged around the raised lip portion, the bifurcate cam follower portion being slidingly engaged with the periphery of the cam member at the bifurcation of the branches.
The container of 10, wherein said rotatable cam member has a pair of raised lip portion at said periphery, wherein each branch of said bifurcate cam follower portion is adapted to be engaged with a separate one of said pair of opposing raised lip portions.
Dependencies are inferred from the claim text.