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US 6,953,702 B2Granted
Fixed wavelength vertical cavity optical devices and method of manufacture therefor
AssigneeAgilent Technologies, Inc.
InventorsJeffrey N. Miller, Virginia M. Robbins, Steven D. Lester
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Abstract
Vertical cavity optical devices, and a method of manufacturing therefor, are provided where the method includes partially forming a first vertical cavity optical device on a wafer, adjusting the lasing wavelength of the first vertical cavity optical device, and fixing the lasing wavelength of the first vertical cavity optical device to complete the forming thereof.
Claims8
A method for manufacturing vertical cavity optical devices comprising:
- forming a first vertical cavity optical device including an upper and lower reflector on a wafer;
- adjusting the lasing wavelength of the first vertical cavity optical device by moving the upper reflector;
- fixing the lasing wavelength of the first vertical cavity optical device by fixing the position of the upper reflector thereof;
- and
- forming a monolithic array with a second vertical cavity optical device having a fixed lasing wavelength different from the fixed lasing wavelength of the first vertical cavity optical device.
2 more elements
A method for manufacturing vertical cavity optical devices comprising:
- forming a first adjustable vertical cavity optical device on a substrate;
- adjusting the lasing wavelength of the first adjustable vertical cavity optical device using a voltage;
- fixing the lasing wavelength of the first adjustable vertical cavity optical device by fixing a height of an air gap therein to complete the forming thereof;
- and
- forming a monolithic array with a second adjustable vertical cavity optical device having a fixed lasing wavelength different from the fixed lasing wavelength of the first vertical cavity optical device.
2 more elements
Dependencies are inferred from the claim text.