Scanning probe microscope with improved probe head mount
AssigneePSIA Corporation
InventorsJoonhyung Kwon, Young Seok Kim, Sang-il Park
Life of this patent
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Abstract
A mounting mechanism for the probe head of a Scanning Probe Microscope (SPM) includes two dovetail and two right and left threaded pushdown screws, for convenient mounting and clamping of the probe head. After inserting the probe head between the upper and lower dovetails of the z stage, handles of the pushdown screws are turned so that the lower portion of the upper dovetail rail clamp down the probe head. This mounting mechanism using the dovetail rails and pushdown screws ensures rigid mount and convenient use of the probe head at the same time.
Claims13
A scanning probe microscope comprising:
- a stationary frame;
- a probe head;
- and
- a translation stage attached to the stationary frame, the translation stage comprising a first rail and a second rail, the second rail being separated from the first rail to accommodate a portion of the probe head therebetween;
- wherein the first rail is rigidly mounted to the translation stage, and the second rail comprises a first portion, a second portion, and a flexure structure therebetween, the first portion being rigidly mounted to the translation stage, and the second rail further comprises at least one screw capable of pushing the second portion of the second rail against said portion of the probe head.
A scanning probe microscope comprising:
- a stationary frame;
- a probe head;
- and
- a translation stage attached to the stationary frame, the translation stage comprising a first rail and a second rail, the second rail being separated from the first rail to accommodate a dovetail of the probe head therebetween;
- wherein the first rail is rigidly mounted to the translation stage, and the second rail comprises a first portion rigidly mounted to the translation stage, and the second rail further comprises means for pushing a second portion of the second rail against said dovetail of the probe head.
Dependencies are inferred from the claim text.