Unipolar electrostatic quadrupole lens and switching methods for charged beam transport
AssigneeAxcelis Technologies, Inc.
InventorsWilliam F. DiVergilio, Youngzhang Huang
Life of this patent
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AssigneeAxcelis Technologies, Inc.
InventorsWilliam F. DiVergilio, Youngzhang Huang
Estimating the term…
A linear acceleration system comprises one or more accelerating stages along an axis and a unipolar electrostatic quadruple lens in series with the one or more accelerating stages. The unipolar electrostatic quadruple lens focuses an ion beam in a direction transverse to the axis. The unipolar electrostatic quadruple lens includes a switching circuit, a first pair of electrodes, and a second pair of electrodes. The switching circuit controllably connects to ground and a first voltage potential. The electrodes of the first pair are located opposite each other and are connected to the switching circuit. The electrodes of the second pair are also located opposite each other and connected to the switching circuit. The second pair of electrodes are biased to a second voltage potential.
An electrostatic quadrupole lens system comprising:
A linear acceleration system comprising:
A method of operating an ion implantation system, comprising:
Dependencies are inferred from the claim text.