Padless structure design for easy identification of bridging defects in lines by passive voltage contrast
AssigneeChartered Semiconductor Manufacturing Ltd.
InventorsZhigang Song, Shailesh Redkar, Chong Khiam Oh
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Abstract
A new test structure to locate bridging defects in a conductive layer of an integrated circuit device is achieved. The test structure comprises a line comprising a conductive layer overlying a substrate. The line is coupled to ground. A plurality of rectangles comprises the conductive layer. The rectangles are not connected to the line or to other rectangles. Near edges of the rectangles and of the line are parallel. The rectangles are floating. The test structure is used with a passive voltage contrast test in a scanning electron microscope. A test structure and method to measure critical dimensions is disclosed.
Claims25
A test structure to measure critical dimension in a conductive layer of an integrated circuit device, said test structure comprising:
- a line comprising a conductive layer overlying a substrate wherein said line is coupled to ground;
- and
- a plurality of rectangles comprising said conductive layer wherein said rectangles are not connected to said line or to other said rectangles, wherein near edges of said rectangles and of said line are parallel, wherein said rectangles are floating, wherein the spaces between said near edges of said rectangles and said line vary over a range of values including the critical dimension value for a process step, and wherein any said rectangle that is shorted to said line will be detected distinctly at said shorted rectangle location by exposing an electron beam to said line and then capturing emitted secondary electrons from said line and said rectangles such that said line and said shorted rectangle have a common emission level while nearby rectangles have a differing said emission level.
A method to measure critical dimension in a conductive layer of an integrated circuit device, said method comprising:
- providing a conductive layer overlying a substrate;
- patterning said conductive layer to form lines and to form a test structure wherein said test structure comprises:
- a line comprising said conductive layer overlying said substrate wherein said line is coupled to ground;
- and
- a plurality of rectangles comprising said conductive layer wherein said rectangles are not connected to said line or to other said rectangles, wherein near edges of said rectangles and of said line are parallel, wherein said near edges are spaced by a constant value, wherein said rectangles are floating, wherein the spaces between said near edges of said rectangles and said line vary over a range of values including the critical dimension value for a process step;
- exposing said test structure to an electron beam;
- and
- capturing emitted secondary electrons from said test structure to measure critical dimension by passive voltage contrast wherein any said rectangle shorted to said line will be detected distinctly at said shorted rectangle location because said line said shorted rectangle have a common emission level while nearby rectangles have a differing said emission level.
A method to measure critical dimensions in a conductive layer of an integrated circuit device, said method comprising:
- providing a conductive layer overlying a substrate;
- patterning said conductive layer to form lines and to form a test structure wherein said test structure comprises:
- a line comprising said conductive layer overlying said substrate wherein said line is coupled to ground;
- and
- a plurality of rectangles comprising said conductive layer wherein said rectangles are not connected to said line or to other said rectangles, wherein near edges of said rectangles and of said line are parallel, wherein said near edges are spaced by non-constant values, wherein said rectangles are floating, wherein the spaces between said near edges of said rectangles and said line vary over a range of values including the critical dimension value for a process step;
- exposing said test structure to an electron beam;
- capturing emitted secondary electrons from said test structure to locate short in said test structure by passive voltage contrast wherein any said rectangle shorted to said line will be detected distinctly at said shorted rectangle location because said line said shorted rectangle have a common emission level while nearby rectangles have a differing said emission level;
- and
- determining critical dimension as smallest said space without said short.
Dependencies are inferred from the claim text.