Method of fabricating multipole lens, multipole lens, and charged-particle beam instrument equipped therewith
AssigneeJEOL Ltd.
InventorEiji Kawai
Life of this patent
Estimating the term…
Abstract
A method of efficiently fabricating a multipole lens. The multipole lens has plural polar elements and an annular holding member. Each polar element has a held portion. The annular holding member is provided with through-holes for holding the held portions of the polar elements. A resin is injected into the through-holes in the holding member via openings formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.
Claims15
A method of fabricating a multipole lens having a plurality of polar elements and an annular holding member, each of said polar elements having a held portion, said annular holding member being provided with radial through-holes for holding the held portions of the polar elements, said method comprising the steps of:
- injecting a resin into the radial through-holes in the holding member via openings formed in the holding member, the openings being in communication with the radial through-holes;
- and
- curing the injected resin to thereby fix the held portions of the polar elements to the holding member within the radial through-holes.
A method of fabricating a multipole lens having a plurality of polar elements and an annular holding member, each of said polar elements having a held portion, said annular holding member being provided with radial through-holes for holding the held portions of the polar elements, said method comprising the steps of:
- inserting the held portions of the polar elements into the radial through-holes in the holding member;
- preparing resin injection means in which a resin is held, the resin injection means having a discharge port;
- placing the resin injection means such that the discharge port is brought into contact with the opening formed in the holding member, the opening being in communication with the radial through-holes;
- and
- placing the holding member in a vacuum ambient together with the resin injection means while the held portions of the polar elements are inserted in the radial through-holes in order to exhaust the through-holes of gas therein,
- whereby the resin is injected into the radial through-holes in the holding member and cured there.
A multipole lens having a plurality of polar elements and an annular holding member, each of said polar elements having a held portion, said annular holding member being provided with radial through-holes in which the held portions of the polar elements are inserted, the radial through-holes being filled with a resin,
- wherein the holding member is provided with openings in communication with the radial through-holes in the holding member to inject the resin into the radial through-holes.
A charged-particle beam instrument fitted with a multipole lens, said instrument having a source of a charged-particle beam for emitting a beam of charged particles, a lens system for controlling the emitted beam to direct it at a specimen, and said multipole lens for correcting aberration in the beam,
- wherein said multipole lens has plural polar elements each having a held portion, and an annular holding member provided with radial through-holes, the held portions of the polar elements being inserted in the radial through-holes filled with a resin, and
- wherein said holding member is provided with openings in communication with the radial through-holes in the holding member of the multipole lens to inject the resin into the radial through-holes.
Dependencies are inferred from the claim text.