Separating apparatus and processing method for plate member
AssigneeCanon Kabushiki Kaisha
InventorsKazutaka Yanagita, Mitsuharu Kohda, Kiyofumi Sakaguchi, Akira Fujimoto
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Abstract
This invention is to guarantee that in separating a plate member such as a bonded substrate stack, a fluid is injected to an appropriate portion of the plate member. While a bonded substrate stack (50) is rotated, the vertical position of its peripheral portion is measured throughout its perimeter by a measuring device (150). Then, while the vertical position of a nozzle (120) is dynamically adjusted on the basis of the measurement result, and at the same time, the bonded substrate stack (50) is rotated, the bonded substrate stack (50) is separated into two substrates at a porous layer by injecting a fluid ejected from the nozzle (120).
Claims12
A separating apparatus for separating a plate member at a separation layer of the plate member, comprising:
- a holding portion that holds a plate member;
- an ejecting portion that ejects a fluid so as to separate the plate member held by said holding portion;
- a measuring device arranged to measure a position of a peripheral portion of the plate member held by said holding portion;
- and
- a driving portion arranged to dynamically drive at least one of said holding portion and said ejecting portion on the basis of a measurement result obtained by said measuring device so that a fluid ejected from said ejecting portion is injected into a concave portion on a peripheral side of the plate member held by said holding portion during separation of the plate member.
Dependencies are inferred from the claim text.