Exhaust gas recirculation system using absolute micromachined pressure sense die

A sensor system, comprising:

• an absolute pressure sensor comprising a plurality of pressure sense die and a hermetically sealed cover located above said plurality of pressure sense die;
• a carrier to which said plurality of pressure sense die are mounted by a cured adhesive, wherein said carrier and said plurality of pressure sense die are attached to a circuit board populated with a plurality of surface mounted components for electrical connection to said absolute pressure sensor, wherein said circuit board comprises a board assembly comprising an over-voltage and reverse polarity protection circuit, an EMC protection circuit, and an output protection circuit;
• a housing in which said absolute pressure sensor is located in association with said carrier and said circuit board populated with said plurality of surface mounted components for electrical connection to said absolute pressure sensor;
• an ASIC for digitally calibrating said plurality of pressure sense die with temperature compensation, wherein said ASIC automatically controls a plurality of output modes thereof during calibration.

An absolute pressure sensing method, comprising the steps of:

• providing an absolute pressure sensor comprising a plurality of pressure sense die and a hermetically sealed cover located above said plurality of pressure sense die;
• mounting said plurality of pressure sense die to a carrier by a cured adhesive, wherein said carrier and said plurality of pressures sense die are attached to a circuit board populated with a plurality of surface mounted components for electrical connection to said absolute pressure sensor;
• and
• automatically and digitally calibrating said plurality of pressure sense die with temperature compensation utilizing an ASIC that controls a plurality of output modes thereof during calibration.