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US 6,941,810 B2Granted
Angular velocity sensor
OwnerKazuhiro Okadainventor
Life of this patent
Estimating the term…
Abstract
An angular velocity sensor for detecting an angular velocity component includes an oscillator having mass, a sensor casing for accommodating the oscillator therewithin, a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing, and capacitance elements including a first electrode provided on a surface of the oscillator and a second electrode provided on a surface of a fixed member fixed to the sensor casing.
Claims2
An angular velocity sensor for detecting an angular velocity component comprising:
- an oscillator made of a substrate with thickness enough to obtain a mass sufficient to provide the sensor with a required sensitivity;
- a sensor casing for accommodating the oscillator therewithin;
- a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing;
- an electrical driving device for oscillating the oscillator using electrical energy, the electrical driving device including a first electrode provided on a surface of the oscillator, a second electrode provided on a surface of a fixed member fixed to the sensor casing and an excitation element applying a voltage between the first electrode and the second electrode;
- and
- a capacitance element including a pair of electrodes, a distance between the pair of electrodes being changed based on a deviation of the oscillator caused by Coriolis force.
3 more elements
Dependencies are inferred from the claim text.