Method and apparatus for controlling process target values based on manufacturing metrics

A manufacturing system, comprising:

• a processing tool adapted to process workpieces in accordance with an operating recipe based on a process target value;
• and
• a target monitor adapted to collect manufacturing characteristic data associated with the workpieces, correlate the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, and adjust the process target value based on the first manufacturing metric distribution.

A manufacturing system, comprising:

• a processing tool adapted to process workpieces in accordance with an operating recipe based on a process target value;
• and
• a target monitor adapted to collect speed rating data associated with the workpieces, correlate the speed rating data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, and adjust the process target value based on the first manufacturing metric distribution.

A manufacturing system, comprising:

• a processing tool adapted to process workpieces in accordance with an operating recipe based on a process target value;
• and
• a target monitor adapted to collect yield data associated with the workpieces, correlate the yield data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, and adjust the process target value based on the first manufacturing metric distribution.

A manufacturing system, comprising:

• a processing tool adapted to process workpieces in accordance with an operating recipe based on a process target value;
• and
• a target monitor adapted to collect power consumption data associated with the workpieces, correlate the power consumption data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, adjust the process target value based on the first manufacturing metric distribution.

A manufacturing system, comprising:

• a processing tool adapted to process workpieces in accordance with an operating recipe based on a process target value;
• and
• a target monitor adapted to collect manufacturing characteristic data associated with the workpieces, correlating the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, correlate the manufacturing characteristic data with a second manufacturing metric to generate a second manufacturing metric distribution for the workpieces, and adjust the process target value based on at least one of the first and second manufacturing metric distributions.