Plasma-resistant articles and production method thereof
AssigneeToshiba Ceramics Co., Ltd.
InventorsKenji Morita, Hiroko Ueno, Haruo Murayama
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Abstract
A plasma-resistant article is provided in which a surface region of the article to be exposed to plasma in a corrosive atmosphere is formed from a zirconia-based ceramic that contains yttria in an amount of 7 to 17 mol %. The plasma-resistant article exhibits a sufficient resistance against exposure to plasma and is cost-effective. Preferably, the surface region has a centerline average roughness (Ra) of 1.2 to 5.0 μm, which is readily achieved through the use of an etching solution containing hydrofluoric acid. The present invention also provides a production method for such a plasma-resistant article.
Claims1
A method for producing a plasma-resistant article, comprising the steps of:
- providing a ceramic article comprising of a zirconia-based ceramic containing 7 to 17 mol % of yttria formed over at least a surface region of the plasma-resistant article to be exposed to plasma in a corrosive atmosphere;
- and
- treating the ceramic article with an etching solution containing hydrofluoric acid to impart to the surface of the zirconia-based ceramic a centerline average roughness (Ra) of 1.2 to 5.0 μm.
Dependencies are inferred from the claim text.