Back to results
US 6,929,874 B2Granted
Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck
AssigneeIbiden Co., Ltd.
InventorsYasuji Hiramatsu, Yasutaka Ito
Life of this patent
Estimating the term…
Abstract
The object of the present invention is to provide an aluminum nitride sintered body which has excellent mechanical strength and in which ceramic particles is prevented from coming off from the surface and/or side thereof and generation of free particles is suppressed. The aluminum nitride sintered body of the present invention is wherein it contains sulfur.
Claims13
A ceramic heater for heating a semiconductor wafer, comprising:
- a sintered ceramic substrate comprising a nitride ceramic or a carbide ceramic, a sectional view of fracture of said sintered ceramic substrate exhibiting intragranular fracture;
- and
- a heating element provided inside of or on a surface of the sintered ceramic substrate.
Dependencies are inferred from the claim text.