Film bulk acoustic device with integrated tunable and trimmable device

A film bulk acoustic device having integrated trimmable device, comprising:

• a FBAR being provided on a common substrate and having an upper electrode, a lower electrode and a first piezoelectric layer between the upper electrode and the lower electrode, an equivalent circuit between the upper electrode and the lower electrode having an equivalent inductance;
• and
• an integrated trimmable device, being provided on the common substrate beside the FBAR and having a electrode, the first end of the electrode being provided on the common substrate and connected with the FBAR and being extended to become a second end of the electrode, the shape of trimmable device being spiral or meander shape;
• wherein the equivalent inductance of the equivalent circuit of at least one of integrated trimmable device and the FBAR is adjusted by trimming the inductance chosen from the group comprising the second end of the electrode and the upper electrode until the film bulk acoustic device having integrated trimmable device achieves the target resonance frequency.