An ultra-thin copper foil with a carrier comprised of a carrier foil, a peeling layer provided on the carrier foil, and an ultra-thin copper layer provided on the peeling layer, wherein a surface roughness Rz of a surface of the carrier foil facing the ultra-thin copper layer is in a range of 0.1 μm to 5 μm, a surface roughness Rz of a surface of the ultra-thin copper layer facing the carrier foil is in a range of 0.1 μm to 5 μm, and wherein there is disposed between said peeling layer and said ultra-thin copper layer a copper or copper alloy layer having a conductivity of at least 90% formed on a surface of the peeling layer facing the ultra-thin copper layer at a position approximately 0.1 μm to 0.2 μm away from an average height of projections extending from a surface relief of a surface of the peeling layer facing the ultra-thin copper layer, and a peel strength after hot bonding of at least 300° C. is 0.01 KN/m to 0.05 KN/m.