High-resolution overlay alignment methods for imprint lithography
AssigneeBoard of Regents, The University of Texas System
InventorsSidlgata V. Sreenivasan, Byung J. Choi, Matthew Colburn, Todd Bailey
Life of this patent
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Abstract
A method of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
Claims26
A method of aligning a substrate with a patterned template spaced-apart from said substrate with a liquid material disposed therebetween, said substrate having substrate alignment marks disposed thereon and said patterned template having template alignment marks formed thereon, said method comprising:
- adjusting a distance between said patterned template and said substrate such that said material contacts both said patterned template and said substrate, defining a contact region;
- and
- varying an overlay placement of said patterned template with respect to said substrate such that said template alignment marks and said substrate alignment marks are substantially aligned, with said distance being established, based upon a viscosity associated with said material, to attenuate resistance to movement between said patterned template and said substrate due to properties of said material.
A method of aligning a substrate with a patterned template spaced-apart from said substrate with a liquid material disposed therebetween, said substrate having substrate alignment marks disposed thereon and said patterned template having template alignment marks formed thereon, said method comprising:
- adjusting a distance between said patterned template and said substrate such that said material contacts both said patterned template and said substrate, defining a contact region;
- varying an overlay placement of said patterned template with respect to said substrate such that said template alignment marks and said substrate alignment marks are substantially aligned by adjustment of said overlay placement through altering dimensions of said patterned template, with said distance being established, based upon a viscosity associated with said material, to attenuate resistance to movement between said patterned template and said substrate due to properties of said material, with said properties including stiction;
- and
- recording multiple patterns in separately dispensed regions of said material, with a subset of said multiple patterns being positioned in differing portions of said material and obtaining a desired alignment between said patterned template and each of said differing portions.
A method of aligning a substrate with a patterned template spaced-apart from said substrate with a liquid material disposed therebetween, said substrate having substrate alignment marks disposed thereon and said patterned template having template alignment marks formed thereon, said method comprising:
- adjusting a distance between said patterned template and said substrate such that said material contacts both said patterned template and said substrate, defining a contact region;
- and
- varying an overlay placement of said patterned template with respect to said substrate such that said template alignment marks and said substrate alignment marks are substantially aligned by employing first and second fluxes of light, each of which has differing characteristics associated therewith, defining first and second characteristics, with said substrate alignment marks and said template alignment marks being responsive to said first characteristics, and defining a first response, and responsive to said second characteristics, defining a second response differing from said first response, with said distance being established, based upon a viscosity associated with said material, to attenuate resistance to movement between said patterned template and said substrate due to properties of said material, with said properties including stiction.
A method of aligning a substrate with a patterned template spaced-apart from said substrate with a liquid material disposed therebetween, said substrate having substrate alignment marks disposed thereon and said patterned template having template alignment marks formed thereon, said method comprising:
- adjusting a distance between said patterned template and said substrate such that said material contacts both said patterned template and said substrate, defining a contact region;
- and
- varying an overlay placement of said patterned template with respect to said substrate such that said template alignment marks and said substrate alignment marks are substantially aligned.
Dependencies are inferred from the claim text.