Miniature 3-dimensional package for MEMS sensors
AssigneeHoneywell International Inc.
InventorDouglas C. MacGugan
Life of this patent
Estimating the term…
Abstract
An apparatus for mechanically mounting one or more Micro Electro-Mechanical System (MEMS) sensors on a stable, structurally sound base, the base being a generally cubical block formed in a ceramic substrate having a plurality of substantially planar and mutually orthogonal surfaces, wherein a first one of the surfaces is structured for rotationally interfacing with a host structure that is to be monitored; one or more of the remaining surfaces is structured for mechanically mounting of a MEMS sensor; and a plurality of electrical signal carriers communicate between each of the MEMS sensor mounting surfaces and a plurality of electrical interface contacts positioned on the interfacing surface.
Claims20
An apparatus for mounting one or more Micro Electro-Mechanical System (MEMS) sensors, the apparatus comprising:
- means for orthogonally orienting each of at least two different MEMS sensor mounting surfaces relative to a common interface surface, the common interface surface being formed on a unitary generally cubical block and the mounting surfaces being recessed within different external surface of the block;
- means for routing electrical power, ground and operational signals between each sensor mounting surfaces and the common interface surface;
- and
- means for rotationally interfacing the common interface surface with an external key mechanism.
An apparatus for mechanically mounting one or more Micro Electro-Mechanical System (MEMS) sensors on a stable, structurally sound base, the base comprising:
- a generally cubical block formed in a substrate having a plurality of substantially planar and mutually orthogonal surfaces;
- a first one of the surfaces being structured for rotationally interfacing with a host structure that is to be monitored;
- a plurality of the surfaces orthogonal to the interfacing surface each being formed with a recessed cavity having a sensor mounting surface formed therein, each of the recessed sensor mounting surfaces being structured for mechanically mounting of a MEMS sensor;
- and
- a plurality of electrical signal carriers communicating between the each of the MEMS sensor mounting surfaces and a plurality of electrical interface contacts positioned on the interfacing surface.
A mounting apparatus for one or more Micro Electro-Mechanical System (MEMS) sensors, the apparatus comprising:
- a generally cubical ceramic block having at least four mutually substantially orthogonal surfaces;
- structure being formed in a first of the surfaces for mechanically interfacing with a host structure that is to be monitored;
- structure being formed in each of a second, a third and a fourth of the surfaces for mounting a MEMS sensor within each of the respective second, third and fourth surfaces;
- a structural key being formed in the first surface for rotationally interfacing with an external key mechanism;
- and
- a plurality of electrical signal carriers communicating between the mounting structure in each of the second and third surfaces and a plurality of electrical interface contacts positioned on the first surface.
Dependencies are inferred from the claim text.