Ionization radiation imageable photopolymer compositions
AssigneeE. I. Du Pont de Nemours and Company
InventorYing Wang
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Abstract
This invention discloses compositions that can be polymerized/crosslinked imagewise upon exposure to ionization radiation such as x-ray, electron beam, ion beam, and gamma-ray. This invention also discloses methods of use for these compositions for microfabrication of ceramics, for stereolithography, and for x-ray, e-beam, and ion-beam lithography which can be used for photoresists.
Claims13
A method of microfabricating ceramic or metal patterns on a solid substrate using ionization radiation comprising the steps of:
- mixing together a light stable composition consisting essentially of a reactive monomer, a multi-functional cross-linking agent and ceramic or metal filler;
- said mixing process optionally carried out either by heating the composition until melted or by dissolving components in a common solvent;
- optionally, in the presence of binder;
- and
- optionally, in the presence of a radiation sensitizer;
- casting the composition on a solid substrate to form a film of desired thickness;
- irradiating the film with ionization radiation through a mask to form a polymerized/cross-linked image;
- developing the polymerized/cross-linked image by rinsing the irradiated film in a solvent to remove unirradiated composition;
- and
- sintering the polymerized/cross-linked image in microfabricated ceramics or metal patterns.
A method of performing lithography on a semiconductor surface using ionization radiation, comprising the steps of:
- mixing together a composition consisting essentially of a reactive monomer and a multi-functional cross-linking agent, optionally by heating the composition until melted or by dissolving in a common solvent;
- optionally, in the presence of a polymer binder;
- and
- optionally, in the presence of a radiation sensitizer;
- casting the composition on the surface of the solid semiconductor substrate to form a film of desired thickness;
- irradiating the film with ionization radiation through a mask to form a polymerized/cross-linked image;
- and
- developing the polymerized/cross-linked image by rinsing the irradiated film in a solvent to remove unirradiated composition.
A method of forming a three-dimensional solid object of polymers, ceramics, or metals using ionization radiation, comprising the steps of:
- mixing together a light stable composition consisting essentially of a reactive monomer, a multi-functional cross-linking agent, and a polymer binder, said mixing process optionally done by dissolving in a common solvent or by pouring the composition into a container with a target substrate immersed in it;
- optionally, in the presence of a radiation sensitizer;
- and
- optionally, in the presence of a metallic or oxide filler;
- irradiating the composition with ionization radiation through a mask or a focused source of ionization radiation to deposit a layer of material on the targeted substrate;
- stepping back the substrate and irradiating the substrate;
- repeating the step of stepping back the substrate and irradiating the substrate until a desired three-dimensional solid object is formed;
- and
- optionally, treating the solid object post-irradiation to burn out polymer binders.
Dependencies are inferred from the claim text.