US 6,916,360 B2 · Adsorption methods

Abstract

An adsorption bed arrangement includes a plurality of adsorption elements, a housing, and a gasket member. Each of the adsorption elements has a first adsorptive media and a second adsorptive media, which remove different contaminants from an incoming air stream. For example, the first adsorptive media removes acidic contaminants and the second adsorptive media removes basic contaminants. The housing defines an interior, a plurality of inlet openings, and a plurality of outlet openings. The adsorption elements are positioned within the housing interior and the housing is selectively openable to provide access to the adsorption elements. A method for changing the media includes removing an access panel from the adsorption bed housing to expose a cover member covering an end of an adsorption element; removing the cover member to expose media within the element; and pouring the media from the element.

Claims8

Dependent claims

A method of filtering air for lithography processing, the method comprising:

(a) passing an incoming air stream through an adsorption bed,
(i) the incoming air stream comprising acidic contaminants, basic contaminants, and non-polar organic contaminants;
(ii) the adsorption bed comprising a first adsorptive media adapted to removing at least the acidic contaminants from the incoming air stream, and a second adsorptive media adapted to removing at least the basic contaminants from the incoming air stream;
(b) providing a clean air stream to the lithography process by:
(i) removing the acidic contaminants from the incoming air stream;
(ii) removing the basic contaminants from the incoming air stream from the incoming air stream having the acidic contaminants removed therefrom;
and
(iii) removing the non-polar organic contaminants from the incoming air stream.

5 more elements

Dependencies are inferred from the claim text.

Adsorption methods

Life of this patent

Adsorption methods

Life of this patent

Abstract

Claims8