US 6,915,693 B2 · MEMS gyroscope having mass vibrating vertically on substrate

Abstract

X type MEMS gyroscope has a first mass vertically vibrating on a substrate and a second mass horizontally vibrating on the substrate. A driving electrode is disposed on the same surface with the first mass. The first mass can move in relation to the second mass in the vertical direction, and is fixed in relation to the second mass in the horizontal direction. The second mass is operative to be moved in a horizontal direction in relation to the substrate by a Coriolis force, which is generated by an angular velocity applied while the first mass is being vibrated. A sensing electrode measures displacement of the second mass in the horizontal direction. All moving electrodes and stationary electrodes are disposed on the same surface, and all elements are manufactured by using one mask. Therefore, adhesion between the moving and stationary electrodes is prevented and the manufacturing process is simplified.

Claims14

Dependent claims

A MEMS (micro electro mechanical system) gyroscope comprising:

a first mass which moves in relation to a substrate in a vertical direction of the substrate;
a driving electrode disposed on a same surface with the first mass on the substrate, the driving electrode being operative to drive the first mass in the vertical direction;
a second mass which moves in relation to the substrate in a horizontal direction that is parallel to the surface, the second mass being operative to be moved by a Coriolis force generated by an angular velocity applied while the first mass is being vibrated by the driving electrode;
a sensing electrode which measures a displacement in the horizontal direction of the second mass;
at least one first spring to fix the first mass and the second mass to each other for the first mass to be able to move in relation to the second mass in the vertical direction and be fixed in relation to the horizontal direction;
and
at least one second spring to fix the second mass on the substrate for the second mass to be able to move in relation to the substrate in the horizontal direction.

4 more elements

Dependencies are inferred from the claim text.

MEMS gyroscope having mass vibrating vertically on substrate

Life of this patent

MEMS gyroscope having mass vibrating vertically on substrate

Life of this patent

Abstract

Claims14