Nanocoated primary particles and method for their manufacture
AssigneeThe Regents of the University of Colorado
InventorsSteven M. George, John D. Ferguson, Alan W. Weimer, Jeffrey R. Wank
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Abstract
Particles have an ultrathin, conformal coating are made using atomic layer deposition methods. The base particles include ceramic and metallic materials. The coatings can also be ceramic or metal materials that can be deposited in a binary reaction sequence. The coated particles are useful as fillers for electronic packaging applications, for making ceramic or cermet parts, as supported catalysts, as well as other applications.
Claims15
A material in the form of non-agglomerated particles, comprising substrate particles less than about 500 microns in size having on the surface thereof an inorganic film formed by an atomic layer deposition process, wherein the inorganic film has a thickness of up to 100 nanometers.
A method for depositing an inorganic film on substrate particles comprising conducting a sequence of two or more self-limiting reactions at the surface of said substrate particles to form coated particles having an inorganic film of up to 100 nanometers in thickness bonded to the surface of said substrate particles, wherein the reactions are conducted in a rotating vessel containing the substrate particles.
Dependencies are inferred from the claim text.