Determining a next tool state based on fault detection information
AssigneeAdvanced Mirco Devices, Inc.
InventorsRobert J. Chong, Michael L. Miller, Alexander J. Pasadyn, Eric O. Green
Life of this patent
Estimating the term…
Abstract
A method and apparatus are provided for determining a next tool state based on fault detection information. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, determining at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data and estimating a next state of the processing tool based on at least the determined portion of the noise.
Claims26
A method, comprising:
- receiving operational data associated with processing of a workpiece by a processing tool;
- performing fault detection analysis on at least a portion of the received operational data;
- determining at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data;
- adjusting the determined portion of the noise based on the fault detection analysis;
- and
- estimating a next state of the processing tool based on at least the adjusted portion of the noise.
An apparatus, comprising:
- an interface adapted to receive operational data associated with processing of a workpiece by a processing tool;
- and
- a control unit communicatively coupled to the interface, the control unit adapted to:
- determine at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data;
- adjust the determined portion of the noise based on fault detection analysis that is performed based on at least a portion of the received operational data;
- and
- estimate a next state of the processing tool based on at least the adjusted portion of the noise.
An apparatus, comprising:
- means for receiving operational data associated with processing of a workpiece by a processing tool;
- means for analyzing, using a fault detection unit, at least a portion of the received operational data to determine a process variation associated with the processing of the workpiece;
- means for determining at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data;
- means for adjusting the determined portion of the noise based on the determined process variation;
- and
- means for estimating a next state of the processing tool based on at least the adjusted portion of the noise.
An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:
- receive operational data associated with processing of a workpiece by a processing tool;
- adjust one or more noise parameters associated with the processing of the workpiece based on analyzing the operational data and based on fault detection analysis that is performed based on at least a portion of the received operational data;
- and
- estimate a next state of the processing tool based on at least the one or more adjusted noise parameters.
A system, comprising:
- a processing tool adapted to provide operational data associated with processing of a workpiece;
- control unit adapted to:
- receive the operational data;
- determine at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data;
- adjust the determined portion of the noise based on fault detection analysis that is performed based on at least a portion of the received operational data;
- and
- estimate a next state of the processing tool based on at least the adjusted portion of the noise.
Dependencies are inferred from the claim text.