Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition

An acid generator having a structure of the following formula (I-1), (I-2), or (I-3),

• wherein V independently represents an oxygen atom, a halogen, or a monovalent organic group, and R individually represents a monovalent organic group with a fluorine content of 50 wt % or less, a nitro group, or a cyano group, wherein the monovalent organic group with a fluorine content of 50 wt % or less is selected from the group consisting of:
• —R11, —CO—R11, —COO—R11, —CON(R11)(R12), —S—R11, —SO2—R11, and —SO2—R11 wherein R11 and R12 individually represent a substituted or unsubstituted linear, branched or cyclic monovalent hydrocarbon group with 1-30 carbon atoms, a substituted or unsubstituted aryl group with 6-30 carbon atoms, or a substituted or unsubstituted monovalent heterocyclic organic group with 4-30 carbon atoms.

An acid generator having a structure of the following formula (I-A) or (I-B),

• wherein V independently represents an oxygen atom, a halogen, or a monovalent organic group, Z1 and Z2 individually represent a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, Y1 represents a single-bond or divalent group, R′ represents a monovalent or divalent substituent, k is an integer of 0 or more, and n is an integer from 0-5.

An acid generator which is an onium sulfonate compound shown by the following formula (I),

• wherein R is a monovalent organic group with a fluorine content of 50 wt % or less, a nitro group, or a cyano group, Z1 and Z2 individually represent a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, and M+ is a monovalent onium cation.

An acid generator which is an onium sulfonate compound shown by the following formula (I-A) or (I-B),

• wherein Z1 and Z2 individually represent a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, Y1 represents a single-bond or divalent group, R′ represents a monovalent or divalent substituent, k is an integer of 0 or more, n is an integer from 0-5, and M+ is a monovalent onium cation.

An acid generator which is an N-sulfonyloxyimide compound of the following formula (2),

• wherein R is a monovalent organic group with a fluorine content of 50 weight % or less, a nitro group, a cyano group, or a hydrogen atom, Z1 and Z2 individually represent a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, R6 and R7 individually represent a hydrogen atom or a substituted or unsubstituted monovalent organic group, or R6 and R7 form a ring together with the carbon atoms, each bonding to either the group R6 or R7, and Y2 is a single bond, a double bond, or a divalent organic group.

An acid generator which is an N-sulfonyloxyimide compound of the following formula (2-A) or (2-B),

• wherein Z1 and Z2 individually represent a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, Y1 represents a single-bond or divalent group, R′ represents a monovalent or divalent substituent, k is an integer of 0 or more, n is an integer from 0-5, R6 and R7 individually represent a hydrogen atom or a substituted or unsubstituted monovalent organic group, or R6 and R7 form a ring together with the carbon atoms, each bonding to either the group R6 or R7, and Y2 is a single bond, a double bond, or a divalent organic group.

A sulfonic acid of the following formula (I-a),

• wherein R is a monovalent organic group with a fluorine content of 50 wt % or less, a nitro group, a cyano group, Z1 and Z2 individually represent a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms;
• wherein the monovalent organic group is selected from the group consisting of:
• —R11, —CO—R11, —COO—R11, —CON(R11)(R12), —S—R11, —SO-R11, and —SO2—R11 wherein R11 and R12 individually represent a substituted or unsubstituted linear, branched or cyclic monovalent hydrocarbon group with 1-30 carbon atoms, a substituted or unsubstituted aryl group with 6-30 carbon atoms, or a substituted or unsubstituted monovalent heterocyclic organic group with 4-30 carbon atoms.

A sulfonate of the following formula (2C),

• wherein R is a monovalent organic group with a fluorine content of 50 wt % or less, a nitro group, a cyano group, or a hydrogen atom, Z1 and Z2 are individually a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, and M is an Na, K, or Li;
• wherein the monovalent organic group is selected from the group consisting of:
• —R11, —CO—R11, —COO—R11, —CON(R11)(R12), —S—R11, —SO—R11, and —SO2—R11 wherein R11 and R12 individually represent a substituted or unsubstituted linear, branched or cyclic monovalent hydrocarbon group with 1-30 carbon atoms, a substituted or unsubstituted aryl group with 6-30 carbon atoms, or a substituted or unsubstituted monovalent heterocyclic organic group with 4-30 carbon atoms.

A sulfonyl halide compound of the following formula (4A),

• wherein R represents a monovalent organic group with a fluorine content of 50 wt % or less, a nitro group, a cyano group, Z1 and Z2 are individually a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, and A is a halogen atom;
• wherein the monovalent organic group is selected from the group consisting of:
• —R11, —CO—R11, —COO—R11, —CON(R11)(R12), —S—R11, —SO—R11, and —SO2—R11 wherein R11 and R12 individually represent a substituted or unsubstituted linear, branched or cyclic monovalent hydrocarbon group with 1-30 carbon atoms, a substituted or unsubstituted aryl group with 6-30 carbon atoms, or a substituted or unsubstituted monovalent heterocyclic organic group with 4-30 carbon atoms.

An acid generator having a structure of the following formula (I-2),

• wherein R individually represents a monovalent organic group with a fluorine content of 50 wt % or less, a nitro group, a cyano group, or a hydrogen atom.