Method and apparatus for probe tip cleaning and shaping pad
AssigneeKulicke and Soffa Industries, Inc.
InventorsGerald W. Back, Son Dang, Bahadir Tunaboylu
Life of this patent
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Abstract
A method and apparatus is provided for cleaning and shaping a probe tip using a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad is constructed on the surface of a support structure, such as a silicon wafer, and is made of an adhesive in contact with abrasive particles. Adhesive is applied in layers with abrasive particles in-between each layer of adhesive. Abrasive particles may vary in size and material from layer to layer to achieve cleaning, shaping and polishing objectives.
Claims18
An apparatus for cleaning and shaping a probe tip comprising:
- a support structure having a surface;
- and
- a pad formed on said surface of said support structure, wherein said pad comprises a plurality of alternating layers of an adhesive layer and an abrasive layer, said plurality of alternating layers including at least two abrasive layers;
- wherein each of said adhesive layer includes an adhesive and each of said abrasive layer includes a plurality of abrasive particles.
An apparatus for cleaning and shaping a probe tip comprising:
- a support structure having a surface;
- a pad formed on said surface of said support structure, wherein said pad comprises a plurality of composite layers, each of said composite layers including an adhesive and a plurality of abrasive particles in contact with said adhesive.
A method for cleaning and shaping a probe tip comprising the steps of:
- inserting the probe tip into a multi-layered adhesive and abrasive particle pad, said pad including a plurality of abrasive layers including abrasive particles, said abrasive layers being separated by an adhesive material;
- and extracting the probe tip.
A method of making a probe tip cleaning and shaping pad comprising the steps of:
- applying an adhesive layer to a support structure;
- applying a plurality of abrasive particles to said adhesive layer to form an abrasive particle layer;
- and
- heating the support structure,
- wherein the step of applying said adhesive layer further comprises rolling the adhesive layer with a rolling tool to remove air bubbles;
- and
- wherein the step of applying the plurality of abrasive particles comprises brushing the plurality of abrasive particles on to said adhesive layer.
A method of making a probe tip cleaning and shaping pad comprising the steps of:
- applying an adhesive layer to a support structure;
- applying a plurality of abrasive particles to said adhesive layer to form an abrasive particle layer;
- and
- heating the support structure,
- wherein the step of applying an adhesive layer further comprises placing the adhesive layer on the support structure and rolling over the adhesive layer with a rolling tool to remove air bubbles;
- and
- wherein the step of applying the plurality of abrasive particles comprises brushing of abrasive particles on to said adhesive layer.
Dependencies are inferred from the claim text.