Spatial light modulators with light blocking/absorbing areas
AssigneeReflectivity, INC
InventorsAndrew G. Huibers, Satyadev R. Patel
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Abstract
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
Claims99
A method for making a spatial light modulator, comprising:
- providing a first substrate that is transmissive to visible light;
- providing a second substrate having an array of circuitry and electrodes thereon;
- depositing a light absorbing layer on the first substrate to selectively block the passage of light through the first substrate, wherein the light absorbing layer is black or dark in color;
- forming an array of deflectable reflective elements on the first or second substrate;
- and
- positioning the first and second substrates proximate to each other to form a substrate assembly, further comprising:
- bonding the first and second substrates together to form the substrate assembly;
- and
- singulating the substrate assembly into a set of assembly dies, each of which comprises a plurality of deflectable reflective elements.
A spatial tight modulator, comprising:
- a first substrate that is transmissive to visible light;
- a second substrate having an array of circuitry and electrodes thereon;
- a light absorbing layer on the first substrate disposed to selectively block the passage of light through the first substrate, wherein the light blocking layer is black or dark in color;
- and
- an array of deflectable reflective elements on the first or second substrate;
- wherein the first and second substrates are positioned proximate to each other as a substrate assembly.
A method for making a spatial light modulator, comprising:
- providing a first substrate and a second substrate;
- forming an array of circuitry and electrodes on the second substrate;
- forming a plurality of strips or frame areas on the first substrate to absorb at least 50% of the light incident on the strips or frame areas;
- forming an array of deflectable reflective elements on the first or second substrate;
- and
- bonding the first and second substrates together to form a substrate assembly.
A spatial light modulator, comprising:
- a first substrate arid a second substrate;
- an array of circuitry and electrodes on the second substrate;
- an opaque layer that forms a pattern on the first substrate in order to absorb at least 50% of the light that is incident on the opaque layer;
- and
- an array of deflectable reflective elements on the first or second substrate;
- wherein the first and second substrates are positioned proximate to each other as a substrate assembly.
A method for making a spatial light modulator, comprising:
- providing a first substrate that is transmissive to visible light;
- providing a second substrate having an array of circuitry and electrodes thereon;
- depositing a light absorbing layer on the first substrate to selectively block the passage of light through the first substrate, wherein the light absorbing layer is black or dark in color;
- forming an array of deflectable reflective elements;
- and
- positioning the first and second substrates proximate to each other to form a substrate assembly such that the array of deflectable reflective elements are positioned between the first and second substrates, further comprising:
- bonding the first and second substrates together to form the substrate assembly;
- and
- singulating the substrate assembly into a set of assembly dies, each of which comprises a plurality of deflectable reflective elements.
Dependencies are inferred from the claim text.