Lens for a scanning electron microscope
AssigneeNational University of Singapore
InventorAnjam Khursheed
Life of this patent
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Abstract
A lens (15) for a scanning electron microscope is adapted to be removably mounted on a specimen stage (1). The lens (15) includes a magnetic circuit (2, 3, 4, 7) having a first magnetic pole piece (7) and a second magnetic pole piece (4), and a specimen holder (5). The specimen holder (5) is located between the first and second magnetic pole pieces (4, 7). The magnetic circuit (2, 3, 4, 7) also includes a lens bore (18) to permit an electron beam (9) to strike a surface of a specimen mounted on the specimen holder (5), in use. The lens bore (18) has a width of greater than 1 mm.
Claims7
An add-on lens for use with a scanning electron microscope, the lens being adapted to be removably mounted on a specimen stage of and below an objective lens of the scanning electron microscope, the add-on lens including (a) a magnetic circuit using a permanent magnet and having a first magnetic pole piece and a second magnetic pole piece, (b) a specimen holder, the specimen holder movably mounted between the first and second magnetic pole pieces for movement in a direction substantially parallel to the magnetic field between the first and second magnetic pole pieces, and (c) a lens bore to permit an electron beam to strike a surface of a specimen mounted on the specimen holder, wherein the lens bore has a width of greater than 1 mm.
Dependencies are inferred from the claim text.