# US 6,905,579 B2 · Cylindrical magnetron target and spindle apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 6,905,579 B2 - Document ID: US6905579B2 - Status: Granted - Kind: B2 - Application number: 10/365,232 - Filed: 2003-02-13 - Published: 2004-08-19 - Granted: 2005-06-14 - Earliest claimed: 2003-02-13 - Assignees: Sputtering Components, Inc. - Inventors: Daniel T. Crowley - Web page: https://patentgrep.com/patent/US6905579B2 ## CPC - H01J 37/3423: {Shape} - H01J 37/3405: {Magnetron sputtering} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A cylindrical magnetron target and spindle attachment apparatus for affixing a cylindrical magnetron target to a rotatable support spindle. The attachment apparatus includes a target and a spindle. The target defines a receiving portion. The spindle has a spindle plug. The spindle plug is disposed within the receiving portion of the target. The attachment apparatus increases the speed and ease of removing and installing cylindrical rotating targets onto a support spindle. ## Claims ### Claim 1 An apparatus for affixing a cylindrical magnetron target to a rotatable support spindle, comprising: a cylindrical target structure having a receiver in a hollow portion of a target structure interior; and a support spindle structure having a spindle plug at one end thereof, the spindle plug being operatively configured to be entirely disposed within the receiver. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein: the receiver comprises a head aperture for receiving a head of a fastener; and the spindle plug comprises a thread aperture for receiving a thread of a fastener. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein the head aperture comprises a socket portion for receiving a socket head of a fastener. ### Claim 4 (depends on 2) The apparatus of claim 2, wherein the head aperture comprises a flat portion for receiving a flat head of a fastener. ### Claim 5 (depends on 2) The apparatus of claim 2, wherein the spindle plug comprises an O-ring groove operatively configured to hold an O-ring seal disposed between an inner surface of the target structure interior and the spindle plug. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the cylindrical target structure comprises a target. ### Claim 7 A sputtering magnetron attachment apparatus comprising: a cylindrical target structure having a receiver in a hollow portion of a target structure interior, the receiver comprising a head aperture for receiving a head of a fastener; and a support spindle structure having a spindle plug at one end thereof disposed within the receiver, the spindle plug comprising a thread aperture for receiving a thread of a fastener; and a fastener disposed within the head aperture and the thread aperture such that the support spindle structure is operatively coupled to the cylindrical target structure. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the fastener comprises a socket head fastener and the head aperture comprises a socket portion for receiving a socket head of the fastener whereby the support spindle structure is flexibly coupled to the cylindrical target structure. ### Claim 9 (depends on 7) The apparatus of claim 7, wherein the fastener comprises a flat head fastener and the head aperture comprises a flat portion for receiving a flat head of the fastener whereby the support spindle structure is securely coupled to the cylindrical target structure. ### Claim 10 (depends on 7) The apparatus of claim 7, wherein the spindle plug comprises an O-ring groove operatively configured to hold an O-ring seal disposed between an inner surface of the target structure interior and the spindle plug. ### Claim 11 (depends on 7) The apparatus of claim 7, wherein the cylindrical target structure comprises a target. ### Claim 12 A method for affixing a cylindrical magnetron target to a rotatable support spindle, the method comprising: providing a cylindrical target structure having a receiver in a hollow portion of a target structure interior; and providing a support spindle structure having a spindle plug at one end thereof; and inserting the spindle plug entirely within the receiver such that the support spindle structure can be connected to the cylindulcal target structure. ### Claim 13 (depends on 12) The method of claim 12, wherein the provided receiver comprises a head aperture for receiving a head of a fastener and the provided spindle plug comprises a thread aperture for receiving a thread of a fastener, the method further comprising steps of: providing a fastener; turning the spindle structure relative to the target structure to align the head aperture with the thread aperture; and installing the fastener through the head aperture into the thread aperture to couple the spindle structure to the target structure. ### Claim 14 (depends on 13) The method of claim 13, wherein the providing a fastener step comprises providing a socket head fastener whereby the spindle structure is flexibly coupled to the target structure. ### Claim 15 (depends on 13) The method of claim 13, wherein the providing a fastener step comprises providing a flat head fastener whereby the spindle structure is securely coupled to the target structure. ### Claim 16 (depends on 12) The method of claim 12, wherein the provided spindle plug comprises an O-ring groove, the method further comprising steps of: providing an O-ring seal; and placing the O-ring seal into the O-ring groove such that the O-ring seal is disposed between an inner surface of the target structure interior and the spindle plug.