Film-processing method and film-processing apparatus
AssigneeTokyo Electron Limited
InventorsTadashi Onishi, Manabu Hama
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Abstract
A film-processing method according to the present invention includes: a processing step of irradiating electron beams onto a film on a surface of an object to be processed to conduct a process to the film; an electric-current measuring step of capturing the electron beams in a vicinity of the object to be processed to measure an electric-current value during the processing step; and a detecting step of detecting an end point of the process to the film, based on an amount of electron obtained by means of a time integration of the electric-current value. According to the present invention, a suitable irradiation of the electron beams onto the film on a surface of the object to be processed can be realized. Thus, a suitable film quality can be obtained.
Claims17
A film-processing method comprising:
- a processing step of irradiating electron beams onto a film on a surface of an object to be processed to modify a quality of the film;
- an electric-current measuring step of capturing the electron beams in a vicinity of the object to be processed to measure an electric-current value during the processing step;
- and
- a detecting step of detecting an end point of the process to the film, based on a time integration of the electric-current value.
A film-processing apparatus comprising:
- a processing unit which irradiates electron beams onto a film on a surface of an object to be processed to modify a quality of the film;
- an electric-current sensor which captures the electron beams as an electric-current in a vicinity of the object to be processed;
- an electric-current measuring unit which measures an electric-current value of the electric-current captured by the electric-current sensor;
- a calculating unit which calculates by time integration of the electric-current value;
- and
- a detecting unit which detects an end point of the process to the film, based on the time integration of the electric-current value.
Dependencies are inferred from the claim text.