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US 6,902,814 B2Granted
Quartz glass parts, ceramic parts and process of producing those
AssigneeTosoh Corporation
InventorsKoyata Takahashi, Michio Okamoto, Masanori Abe
Life of this patent
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AssigneeTosoh Corporation
InventorsKoyata Takahashi, Michio Okamoto, Masanori Abe
Estimating the term…
In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc., there are problems such as peeling off of the parts themselves during the use, peeling off of film-like substances adhered to the part surfaces, contamination of the products and short life time of the parts caused by corrosion of the part surfaces by plasma, and reduction in the productivity by frequent exchange of the parts. In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc., with respect to parts, the surface of which is constituted of a ceramic thermal sprayed coating, ones having the ceramic thermal sprayed coating having a surface roughness Ra of from 5 to 20 μm are high in adherence of a film-like adherence, ones having the ceramic thermal sprayed coating having a surface roughness Ra of from 1 to 5 μm are high in plasma resistance, and ones in which grooves having a large anchor effect to the thermal sprayed coating is formed on a substrate on which the ceramic thermal sprayed coating is formed are free from peeling off of the ceramic thermal sprayed coating from the substrate and are high in durability.
A quartz glass part comprising a quartz glass and a ceramic thermal sprayed coating formed on the surface of the quartz glass, wherein the ceramic thermal sprayed coating is made of alumina, partially stabilized zirconia, or magnesia-alumina spinel, which is a spherical powder having a relative density of 80% or more, the ceramic thermal sprayed coating having a surface roughness Ra of from 5 to 20 μm and a relative density of from 70 to 97%.
A quartz glass part comprising a quartz glass and a ceramic thermal sprayed coating formed on the surface of the quartz glass, the quartz glass having a surface roughness Ra of from 5 to 15 μm and an average length of micro-cracks of from 1 to 100 μm, with an average angle of the micro-cracks to the quartz glass surface being from 10 to 70°, and the ceramic thermal sprayed coating having a surface roughness Ra of from 5 to 20 μm and a relative density of from 70 to 97%.
A quartz glass part comprising a quartz glass and a ceramic thermal sprayed coating formed on the surface of the quartz glass, the quartz glass having from 10 to 200 per millimeter of grooves having a width of from 5 to 50 μm, and the ceramic thermal sprayed coating having a surface roughness Ra of from 1 to 20 μm.
A quartz glass part comprising a quartz glass and a ceramic thermal sprayed coating formed on the surface of the quartz glass, the quartz glass having from 10 to 200 per millimeter of grooves having a width of from 5 to 50 μm and a length of from 10 to 200 μm, and the ceramic thermal sprayed coating having a surface roughness Ra of from 1 to 20 μm.
A ceramic part comprising a ceramic substrate having a ceramic thermal sprayed coating formed thereon, the ceramic thermal sprayed coating having a surface roughness Ra of from 5 to 20 μm and having a peel strength of 8 Mpa or more to the substrate after heat treatment at from 1,000 to 1,600° C.
Dependencies are inferred from the claim text.