Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsHyun-Sik Yu, Ji-Man Choi, In-Dae Shin
Life of this patent
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Abstract
A needle fixture of a probe card and a needle fixing method in semiconductor inspection equipment include a needle fixture of a probe card in semiconductor inspection equipment including a printed circuit board; a needle fixture installed in the printed circuit board; a resin unit affixing a probe needle to the needle fixture using an adhesive; and a separation preventer for preventing separation of the resin unit from the needle fixture, wherein the separation preventer includes: a plurality of notches formed along a bottom surface of the needle fixture; and the adhesive filling the plurality of notches.
Claims7
A needle fixture of a probe card in semiconductor inspection equipment comprising:
- a printed circuit board;
- a needle fixture installed in the printed circuit board;
- a resin unit affixing a probe needle to the needle fixture using an adhesive;
- and
- a separation preventer for preventing separation of the resin unit from the needle fixture, wherein the separation preventer includes:
- a plurality of notches formed along a bottom surface of the needle fixture;
- and
- the adhesive filling the plurality of notches.
Dependencies are inferred from the claim text.