Methods to make bimorph MEMS devices

A method of producing a bimorph structure or an array of bimorph structures comprising:

• depositing a first material onto a surface of a first substrate to form at least one first element structure;
• depositing a second material onto a surface of a second substrate to form at least one second element structure;
• depositing electrodes on a surface of each of the at least one first element structure and the at least one second element structure;
• bonding the at least one first element structure to a first transfer substrate;
• bonding the at least one second element structure to a second transfer substrate;
• removing the first substrate from the first element structure;
• removing the second substrate from the second element structure;
• depositing second side electrodes on a second surface of each of the at least one first element structure and the at least one second element structure;
• bonding the at least one first element structure directly to the at least one second element structure;
• removing one of the first transfer substrate and the second transfer substrate;
• bonding a surface of the at least one element structure from which one of the first transfer substrate or the second transfer substrate has been removed, to a final target substrate;
• removing the other transfer substrate;
• and
• adding electrical connections.