Manifolded fluid delivery system

A modular manifold for channeling high purity fluid streams of an integrated fluid delivery system, comprising:

• a first base, the first base having first and second surfaces, the first surface including at least one first seamless slot formed thereon, the at least one first seamless slot including, along a surface thereof, a first sealed slot porting aperture extending from the surface of the first seamless slot through the first base portion;
• a mixing slot formed in the first surface of the first base for atomizing the fluid and combining it with a gas stream using a venturi effect;
• and
• a face plate, the face plate being sealed to the first surface of the base for enclosing the at least one first seamless slot.

A modular manifold for channeling high purity fluid streams of an integrated fluid delivery system, comprising:

• a first base, the first base having first and second surfaces, the first surface including a first plurality of integrated seamless slots formed thereon, each one of the first plurality of slots including, along a surface thereof, a first sealed slot porting aperture extending from the surface of the slot through the first base portion;
• a mixing slot formed in the first surface of the first base for atomizing the fluid and combining it with a gas stream using a venturi effect;
• and
• a face plate, the face plate being sealed to the first surface of the base for enclosing the first plurality of seamless slots, the face plate including a plurality of sealed plate porting apertures, each one of the plurality of sealed plate porting apertures positioned to overlay at least one of the first plurality of seamless slots with the first plurality of sealed slot porting apertures in fluidic communication with at least a corresponding one of the plurality of sealed plate porting apertures by way of the sealed slots.

An integrated fluid delivery system for providing a stream of fluid, comprising:

• a first modular manifold for internally channeling the fluid along seamless slots formed therein, the first modular manifold receiving one or more fluids at corresponding sealed porting apertures thereof;
• a mixing slot formed in the first modular manifold for atomizing the fluid and combining it with a gas stream using a venturi effect;
• and
• a flow controller in fluidic communication with the first modular manifold for dispensing a precise volume of fluid from the integrated liquid delivery system.

A modular manifold for channeling high purity fluid streams of an integrated fluid delivery system, comprising:

• a first base, the first base having first and second surfaces, the first surface including at least one first seamless slot formed thereon, the at least one first seamless slot including, along a surface thereof, a first sealed porting aperture extending from the surface of the first seamless slot through the first base, the first sealed porting aperture being sealed with a metal seal;
• a mixing slot formed in the first surface of the first base for atomizing the fluid and combining it with a gas stream using a venturi effect;
• and
• a face plate, the face plate being sealed to the first surface of the first base enclosing the at least one first seamless slot.