System and method for fingerprinting of semiconductor processing tools
AssigneeASM International N.V.
InventorsJohan Siegers, Kornelius Haanstra, Jan Zinger
Life of this patent
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Abstract
A system and method is used for measuring the performance of semiconductor processing tools. A software component may be used to define a set of performance variables and associate performance limits. From the set of performance variables, a set of variables may be selected to create a customized test for a particular tool. The system may be used to store the results of the tests within the system for fast comparison with the associated performance limits, with previous test results, or both. The system may be used to display an overall status of groups of performance variables.
Claims24
A computer-readable-medium containing computer-executable instructions for performing a method for assuring the quality of a semiconductor processing tool, the semiconductor processing tool coupled to a process tool controller, the method comprising:
- (a) measuring a first set of values for a test set of one or more performance variables, the one or more performance variables being adapted to measure the performance of the semiconductor processing tool;
- (b) storing the first set of values in a computer-readable medium coupled to the process tool controller;
- (c) subsequently measuring a second set of values for the test set of one or more performance variables;
- (d) storing the second set of values in a computer-readable medium coupled to the process tool controller;
- (e) retrieving the first set of values from the computer-readable medium storing the first set of values, after performing element (c);
- and
- (f) comparing the second set of values with the first set of values.
A computer-readable-medium containing computer-executable instructions for performing a method for assuring the quality of a semiconductor processing tool, the semiconductor processing tool coupled to a process tool controller, the method comprising:
- (a) storing a first set of performance variables as a master file in a first computer-readable medium, at least one of the first set of performance variables being associated with at least one semiconductor processing tool type and being associated with one or more limit values;
- (b) selecting a semiconductor processing tool type;
- (c) in response to element (b), selecting a second set of performance variables from among the performance variables in the first set of one or more performance variables, said second set of one or more performance variables being associated with the semiconductor processing tool type selected in element (b);
- and
- (d) storing the second set of one or more performance variables with associated limit values in a second computer-readable medium.
A process tool controller configured to perform a method for assuring the quality of a semiconductor processing tool coupled to the process tool controller, the method comprising:
- (a) acquiring a set of processing tool values for a test file, the test file comprising a subset of semiconductor processing tool performance variables automatically generated from a master file;
- (b) storing the set of values in a first computer-readable medium.
Dependencies are inferred from the claim text.