Optical deflector

An optical deflector comprising:

• a mirror structure having a first surface and a second surface which are in a front/back relation, the mirror structure comprising a pair of supports, a movable plate which is moved with respect to the supports, and a pair of elastic members for connecting the movable plate and the supports, such that the movable plate is able to rock with respect to the supports about the pair of elastic members as a rocking axis, the supports having a first surface and a second surface, which respectively comprise a part of the first surface and a part of the second surface of the mirror structure, the movable plate having a first surface and a second surface, which respectively comprise a part of the first surface and a part of the second surface of the mirror structure, and the movable plate having a mirror surface on the second surface;
• a single plate base for holding the mirror structure, the mirror structure and the base being individual elements, the base having an opening for exposing the mirror surface, the base having bonding portions projecting from the base, the bonding portions being located on each of two opposing sides of the opening, and the supports of the mirror structure being fixed to the bonding portions of the base by adhesion with the second surfaces of the supports in contact with the bonding portions, so that the mirror structure is positioned remote from the base;
• and
• driving means for driving the mirror structure, the driving means including a conductive element formed on the first surface of the movable plate and a magnetic circuit, the magnetic circuit comprising a pair of magnetic field generating elements and a yoke of magnetic material connecting the magnetic field generating elements, the magnetic circuit being mounted only-on the same side of the base on which the mirror structure is mounted, the mirror structure being fixed to the bonding portions so as to be offset from the base and the conductive element being positioned so as to overlap the magnetic field generating elements as viewed from a direction parallel to the first and second surfaces of the mirror structure, and at least a part of the yoke is disposed in the vicinity of the first surface of the movable plate.