Field emission device using a reducing gas and method for making same
AssigneeCommissariat a l'Energie Atomique
InventorsRobert Meyer, Jean-François Boronat, Michel Levis
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Abstract
The invention concerns a device comprising at least one field effect electron source within a sealed structure, which encompasses an internal space that contains a reducing gas whose purpose is to prevent oxidation of the emissive material of the electron source, whereby the reducing gas is a gas with the formula NxHy where x=1 or 2 and y=3 or 4, and which is advantageously under a pressure of between 10−8 and 10−1 mbar. It also concerns manufacturing processes for such a device and apparatuses for implementing these processes.
Claims33
A device (1) comprising at least one field effect electron source (5) within a sealed structure, which encompasses an internal space (11) that contains a reducing gas whose purpose is to prevent oxidation of the emissive material of the electron source, whereby the reducing gas comprises a gas with the formula NxHy where x=1 or 2 and y=3 or 4.
Dependencies are inferred from the claim text.