Multi-axes, sub-micron positioner
AssigneeBaldor Electric Company
InventorsJohn Andrew Heilig, Bahram Berj Kafai, Glenn Sterling Trammell
Life of this patent
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Abstract
A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.
Claims11
A motion control system for positioning an object with sub-micron resolution, comprising:
- a base;
- and
- a positioner adapted for movement on the base, the positioner comprising a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object.
A motion control system for positioning an object with sub-micron resolution, comprising:
- a base;
- and
- a positioner adapted for movement of the base, the positioner comprising a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, the first stage housing comprising a surface having bearings positioned thereon, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for first positioning of the object, the second stage comprising a piezoelectric actuator.
Dependencies are inferred from the claim text.