US 6,888,139 B2 · Electron microscope

Abstract

The present invention provides an analysis of displacement by calculating the phase variance image P′ (k, l) between Fourier transformed images of paired images S1 (n, m) and S2 (n, m) to determine the center of gravity of δ peak appearing on the invert Fourier transform image of the images. The present invention provides numerous advantages such as a precision of displacement analysis of a fraction of pixel to thereby allow to improve the precision of focal analysis, or reduced number of pixels required to achieve the same precision, evaluation of reliability of the analysis by using the δ peak intensity, influence of varying background reduced by using a phase variance component. The improved performance by the present invention allows any operator skilled or not to achieve a best focusing.

Claims4

Dependent claims

An electron beam apparatus, comprising:

a source of charged particle beam;
a specimen stage for holding a specimen;
a specimen stage controller for moving the specimen stage;
a deflector coil for deflecting an incident position of a first charged particle beam into the specimen;
a detector for detecting a second charged particle beam from the specimen and generating an image signal;
a computer for obtaining a plurality of images from the image signal to calculate a transfer speed of the specimen;
and
a deflector coil controller for controlling the operation of the deflector coil so as to cancel out the influence of transfer of the specimen stage.

5 more elements

Dependencies are inferred from the claim text.

Electron microscope

Life of this patent

Electron microscope

Life of this patent

Abstract

Claims4