Absorption current image apparatus in electron microscope
AssigneesHitachi, Ltd., Hitachi High-Technologies Corporation
InventorsTakashi Ohshima, Hiroshi Makino, Hiroshi Toyama, Hiroyuki Shinada
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Abstract
It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.
Claims13
In an electron microscope apparatus for microscopic observation by irradiating a sample with an electron beam,
- an absorption current image apparatus comprising:
- a means for modulating said electron beam by a given frequency;
- a means for irradiating said sample with the modulated electron beam;
- and
- a means for measuring a modulation frequency component of current produced by said electron beam in the sample.
Dependencies are inferred from the claim text.