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AssigneeJEOL Ltd.
InventorsAtsushi Yamada, Tsutomu Negishi, Toshiharu Kobayashi, Norio Watanabe
Estimating the term…
There is disclosed a scanning electron charged-particle beam instrument facilitating a search for a desired field of view on a specimen. Also, a method of observing a specimen image with this instrument is disclosed. In field of view search mode, low-magnification images are gained from plural regions on the specimen. The image signals gained from the regions are sent to corresponding image memories and stored there. At the same time, the X and Y coordinates of the specimen at the low magnification are stored. If the image is rotated, the angular position and the direction are simultaneously stored. The image signals stored in the image memories are supplied to a CRT, and plural specimen images are displayed on the CRT. If a human operator selects a desired one out of the displayed images, a control unit controls a stage control unit according to coordinates read out, driving an X-Y translation stage. The stage is moved to bring a specimen position corresponding to the selected image onto the optical axis of the electron beam.
A scanning charged-particle beam instrument having a specimen stage capable of moving in X- and Y-directions and providing positional information on a plurality of positions, and a charged-particle beam illumination means for illuminating a specimen held on the specimen stage with a charged-particle beam, a scanning means for scanning the charged-particle beam in two dimensions across the specimen in each of the plural positions providing different fields of view, a detector for detecting signals arising from the specimen, and a control means for displaying a scanned image of the specimen in response to an output signal from the detector, said scanning charged-particle beam instrument comprising:
A method of observing an image of a specimen with a scanning charged-particle beam instrument having a specimen stage capable of moving in X- and Y-directions and providing plural positions and positional information, a charged-particle beam illumination means for illuminating a specimen held on the specimen stage with a charged-particle beam, a scanning means for scanning the charged-particle beam in two dimensions across the specimen in each of the plurality of positions providing different fields of view, a detector for detecting signals arising from the specimen, a control means for displaying one or more scanned images of the specimen in response to an output signal from the detector, and a selecting means for permitting one to select a desired specimen image from the displayed specimen images, said method comprising the steps of:
Dependencies are inferred from the claim text.