Quartz glass body having improved resistance against plasma corrosion, and method for production thereof
AssigneesHerseus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
InventorsTatsuhiro Sato, Nobumasa Yoshida, Akira Fujinoki, Kyoichi Inaki, Tomoyuki Shirai
Life of this patent
Estimating the term…
Abstract
An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2 per 100 cm3.
Claims12
An article comprising a body made of quartz glass having improved corrosion resistance against plasma, the quartz glass containing bubbles and crystalline phase at a quantity accounting for less than 100 mm2 in a projection area per 100 cm3 of the quartz glass body, and said quartz glass body having a metallic element containing surface layer having a thickness of at least 5 mm containing 0.1 to 20% by weight of a metallic element, wherein the metallic element is selected from the group consisting of Sm, Y, Zr and Ti.
Dependencies are inferred from the claim text.