Monolithic printhead with self-aligned groove and relative manufacturing process
AssigneeOlivetti Tecnost S.p.A.
InventorsRenato Conta, Anna Merialdo
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Abstract
A monolithic thermal ink jet printhead (40) comprising a groove (45), a plurality of chambers (74) and nozzles (56) is manufactured by means of steps of: (203, 205) partially etching the groove (45) by means of a “dry” process and a “wet” process; (210) depositing a plurality of sacrificial layers (54); (212) obtaining a plurality of casts (156); (216) completing the etching of the groove (45) by means of an electrochemical process; and (220) removing the casts (156) and the sacrificial layers (54) in such a way as to obtain a plurality of nozzles (56) and chambers (74).
Claims8
A process for manufacturing a thermal ink jet printhead comprising nozzles, chambers and a groove suitable for fluidly ducting ink to said chambers, comprising the steps of:
- arranging a wafer containing a geometric reference, and having an upper face and a lower face,
- producing a first portion of said groove by means of a dry etching on said lower face, and
- producing a second portion of said groove by means of an electrochemical etching;
- and
- producing an anti-cavitation layer of electrically conducting material on said upper face;
- said step of producing said second portion of said groove by means of said electrochemical etching uses as the electrode, said anti-cavitation layer of electrically conducting material.
A process for manufacturing a thermal ink jet printhead comprising nozzles, chambers and a groove suitable for fluidly ducting ink to said chambers, comprising the steps of:
- arranging a wafer containing a geometric reference, and having an upper face and a lower face;
- producing a first portion of said groove by means of a dry etching on said lower face;
- producing a second portion of said groove by means of an electrochemical etching;
- producing an anti-cavitation layer of electrically conducting material on said upper face;
- growing a first metal or a second metal, and wherein said anti-cavitation layer and said first metal or said second metal are extended locally to a P+ contact.
Dependencies are inferred from the claim text.