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US 6,887,358 B2Granted
Installation for processing wafers
AssigneeInfineon Technologies AG
InventorJürgen Elger
Life of this patent
Estimating the term…
Abstract
An installation for processing wafers with a plurality of fabrication units and a plurality of measurement units as well as a transport system for transporting the wafers, is described. A transport control unit, which detects a capacity utilization of the installation and saves a processing sequence of the wafers, is allocated to the transport system. As a function of these parameters, control instructions are generated in the transport control unit, and can be output to the transport system for controlling the wafer transport procedure.
Claims25
An installation for processing wafers, the installation comprising:
- a plurality of fabrication units;
- a plurality of measurement units;
- a transport system for transporting the waters to/from at least one of said fabrication units and said measurement units, said transport system containing a plurality of components on which the wafers are transported;
- and
- a transport control unit configured to detect a capacity utilization of said components of said transport system and configured to save a processing sequence of the wafers, said transport control unit being allocated to said transport system, and, in dependence on the capacity utilization of said transport system and the Processing sequence of the wafers, said transport control unit generating control instructions received by said transport system for controlling a wafer transport procedure.
2 more elements
Dependencies are inferred from the claim text.