Self-aligned pole trim process
AssigneeHeadway Technologies, Inc.
InventorsCherng-Chyi Han, Mao-Min Chen, Fenglin Liu
Life of this patent
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Abstract
A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.
Claims9
A method for forming a trimmed upper pole piece for a magnetic write head, said upper pole piece being of uniform width above and below a write gap layer, comprising:
- providing a magnetic shield layer, said shield layer being formed of material having a first ion-beam etch rate;
- forming on said shield layer a write gap layer, said layer being formed of material having a second ion-beam etch rate;
- forming on said write gap layer a seed layer, said seed layer having a third ion-beam etch rate;
- forming on said seed layer a plated upper pole portion, said plated pole portion being formed to a uniform initial width by a plating process and said pole portion being formed of material having a fourth ion-beam etch rate, wherein said first, second, third and fourth ion-beam etch rates are substantially equal;
- trimming said shield layer, said write gap layer, said seed layer and said pole portion to form an upper pole piece of uniform final width above and below said write gap layer using an ion-beam in an ion-beam etching (IBE) process further comprising:
- first using said ion-beam in a high angle IBE to remove portions of the seed layer laterally disposed to either side of the plated pole portion, leaving only a portion of the seed layer remaining beneath said plated pole portion;
- next using said ion-beam in a shallow angle IBE to create a pedestal in the shield layer and trimming, thereby, the write gap layer to the width of said pedestal;
- and then
- using said ion-beam in a high angle IBE to produce a uniform width of the pedestal, the write gap layer formed on the pedestal, the seed layer formed on the write gap layer and the plated pole portion formed on the seed layer.
Dependencies are inferred from the claim text.