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US 6,887,125 B2Granted
Polishing apparatus, polishing method, control program for causing computer to execute polishing, and recording medium
AssigneeOlympus Optical Co., Ltd.
InventorToshio Kurogouchi
Life of this patent
Estimating the term…
Abstract
A polishing apparatus includes a table on which a polishing target member is placed, and at least one nozzle which sprays a polishing solution to a surface of the polishing target member so as to form, by polishing, the surface of the polishing target member. The nozzle and the polishing target member move relative to each other, and an angle of the nozzle is changeable.
Claims11
A polishing apparatus comprising:
- a table on which an optical target member is placed;
- and
- at least one nozzle which forms and polishes a surface of the optical target member by spraying a polishing solution onto the surface of the optical target member,
- wherein the nozzle and the optical target member are movable relative to each other, and
- wherein an angle of the nozzle relative to the optical target member is changeable.
2 more elements
A polishing apparatus comprising:
- a table on which a polishing target member is placed;
- at least one nozzle which sprays a polishing solution onto a surface of the polishing target member;
- measuring means for measuring a shape of the polishing target member;
- polishing amount setting means for setting a polishing amount of each portion of the polishing target member based on measurement data produced by the measuring means;
- processing condition setting means for setting a processing condition according to quality of material of the polishing target member and polishing information;
- and
- moving means for moving the nozzle and the polishing target relative to each other.
4 more elements
Dependencies are inferred from the claim text.