Continuous production vacuum sintering apparatus and vacuum sintering system adopted to the same
AssigneeTeco Nanotech Co., Ltd.
InventorsChun-Yen Hsiao, Yu-An Li, Jin-Lung Tsai, Kuei-Wen Cheng
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AssigneeTeco Nanotech Co., Ltd.
InventorsChun-Yen Hsiao, Yu-An Li, Jin-Lung Tsai, Kuei-Wen Cheng
Estimating the term…
A continuous production vacuum sintering apparatus has a conveyer unit and a plurality of vacuum sintering systems individually transferred by the conveyer unit. Each of the vacuum sintering systems includes a sintering furnace, a vacuum control unit communicating with the sintering furnace via an exhaustion valve, a temperature control unit electrically connecting the sintering furnace, and a partition disposed in the sintering furnace and adjacent to the exhaustion valve. The vacuum sintering systems correspond to respective sintering steps, each of which continues from a previous one with a predetermined period. The vacuum sintering systems are separate from one another. The respective pressure and temperature conditions provided by the corresponding vacuum sintering systems do not interfere with one another.
A continuous production vacuum sintering apparatus, comprising:
A vacuum sintering system adopted for a electron emission source, comprising:
Dependencies are inferred from the claim text.