Gas supply unit
AssigneeCkd Corporation
InventorsMasaki Ichikawa, Satoru Isayama, Shigenobu Nishida, Toshikazu Miwa
Life of this patent
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Abstract
A gas supply unit includes a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices to connect the fluid control devices in fluid communication. One of the passage blocks is provided with an inlet port and an outlet port, a filter cavity sealingly formed between the inlet port and the outlet port, and a filter built-in the filter cavity.
Claims25
A gas supply unit including a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices,
- wherein one of the passage blocks includes
- an inlet port and an outlet port,
- a filter cavity sealingly formed between the inlet port and the outlet port, and
- a filter built in the filter cavity.
A gas supply unit including a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices,
- wherein one of the passage blocks includes
- an inlet port and an outlet port,
- a filter cavity formed between the inlet port and the outlet port and provided with an opening on a base member side, and
- a metal filter built in the filter cavity, and
- the metal filter is positioned by a filter retainer of a cup-like shape having an upward opening to sealingly close the filter cavity,
- the block is provided with an inlet passage formed through a side wall of the filter retainer to bring the filter cavity in communication with the inlet port, and
- the block is further provided with an outlet passage formed above the metal filter to bring the filter cavity in communication with the outlet port.
A gas supply unit including a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices,
- wherein one of the passage blocks includes
- an inlet port and an outlet port,
- a filter cavity formed between the inlet port and the outlet port and provided with an opening in a side surface of the block, and
- a filter built in the filter cavity, and
- the filter has a cylindrical shape having an open end and a closed end and is positioned in place when inserted in the filter cavity through the opening thereof, the filter being communicated with the inlet port through the open end and the inlet port being communicated with the outlet port through the filter.
A passage block, shaped as a rectangular parallelepiped block, having a lower surface which is in contact with a base member and an upper surface which is in contact with a fluid control device when the passage block is disposed between the base member and the fluid control device, the passage block including:
- an inlet port formed in the upper surface;
- an outlet port formed in the upper surface;
- a through hole through which a bolt passes to connect the passage block with the base member;
- a screw hole in which a bolt is screwed to connect the fluid control device with the passage block;
- a filter cavity sealingly formed between the inlet port and the outlet port;
- and
- a filter built in the filter cavity.
A passage block, shaped as a rectangular parallelepiped block, having a lower surface which is in contact with a base member and an upper surface which is in contact with a fluid control device when the passage block is attached between the base member and the fluid control device, the passage block including:
- a first port formed in a side surface of the block;
- a second port formed in the upper surface;
- a through hole through which a bolt passes to connect the passage block with the base member;
- a screw hole in which a bolt is screwed to connect the fluid control device with the passage block;
- a filter cavity sealingly formed between the first port and the second port;
- and
- a filter built in the filter cavity.
Dependencies are inferred from the claim text.