Modified dual diaphragm pressure sensor

A device for sensing pressure, comprising:

• sealed chamber means for defining a sealed chamber;
• first flexible diaphragm means for mounting in communication with said sealed chamber means, said first flexible diaphragm means having a conductive surface;
• insulator means for insulating said first diaphragm and being mounted on the other side of said first flexible diaphragm means;
• second flexible diaphragm means for mounting in communication with said insulator means, said second flexible diaphragm means having a conductive surface;
• sensor chamber means for communicating with a sensing atmosphere and mounted on the other side of said second flexible diaphragm means;
• and
• electrical connection means for measuring the capacitance between said first and said second flexible diaphragm means as a function of the pressure in said sensor chamber means introduced through said opening.

A method for sensing pressure in a sensing atmosphere, comprising the steps of:

• exposing a sensor to said sensing atmosphere by a sensor device having two ends, said sensor device having an opening at one end for communication with said sensing atmosphere, said opening forming part of a sensor chamber defining part;
• a sealed chamber defining part forming the other end of said device;
• said device having a first flexible diaphragm having two sides and mounted on one side in communication with the chamber in said sealed chamber defining part, said first flexible diaphragm having a conductive surface;
• said device having an insulator on the other side of said first flexible diaphragm;
• said device having a second flexible diaphragm having two sides and mounted on one side in communication with said insulator, said second flexible diaphragm having a conductive surface;
• said sensor chamber defining part being mounted on the other side of said second flexible diaphragm;
• providing one of said first and second flexible diaphragms with openings it its surface to permit fluid to flow through said openings and the other of said first and second diaphragms being solid and responsive to change in pressure in said sensor chamber to move away from or toward said one of said flexible diaphragms;
• making electrical connections contacting said first and said second flexible diaphragms and measuring the capacitance between said diaphragms as a function of the pressure in said sensor chamber introduced through said opening and causing said one flexible diaphragms to move with respect to the other of said flexible diaphragms;
• and
• noting the pressure in said sensing atmosphere as a function of said capacitance.