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US 6,886,402 B2Granted
Gas flow rate and temperature measuring element
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMasao Kikuchi, Tomoya Yamakawa
Life of this patent
Estimating the term…
Abstract
Gas temperature detection wiring is provided with a first wiring portion disposed parallel to and in close proximity to a flow rate detector portion for a length substantially equivalent to a length of the flow rate detector portion; and a second wiring portion disposed so as to extend from the first wiring portion to an end portion of a pectinate pattern of a gas temperature detector portion. The gas temperature detection wiring is formed so as to connect electrode terminals and the gas temperature detector portion. A high-thermal-resistance portion having increased thermal resistance is constructed by reducing a width of a portion of the second wiring portion.
Claims8
A gas flow rate and temperature measuring element comprising:
- a flat substrate;
- a flow rate detector portion made of a thermosensitive resistor film formed on a front surface of said flat substrate;
- a gas temperature detector portion made of a thermosensitive resistor film formed on said front surface of said flat substrate so as to be separated from said flow rate detector portion;
- flow rate detection and gas temperature detection electrode terminals formed on an end portion of said front surface of said flat substrate across said flow rate detector portion from said gas temperature detector portion;
- flow rate detection wiring formed on said front surface of said flat substrate so as to connect said flow rate detection electrode terminals and said flow rate detector portion;
- gas temperature detection wiring formed on said front surface of said flat substrate so as to connect said gas temperature detection electrode terminals and said gas temperature detector portion;
- and
- cavities formed from a rear surface side of said flat substrate under said flow rate detector portion and said gas temperature detector portion, respectively,
- wherein said gas temperature detection wiring is provided with:
- a first wiring portion disposed parallel to and in close proximity to said flow rate detector portion for a length substantially equivalent to a length of said flow rate detector portion;
- and
- a second wiring portion disposed so as to extend from said first wiring portion to said gas temperature detector portion,
- a high-thermal-resistance portion being formed in at least a portion of said second wiring portion.
10 more elements
A gas flow rate and temperature measuring element comprising:
- a flat substrate;
- a flow rate detector portion made of a thermosensitive resistor film formed on a front surface of said flat substrate;
- a gas temperature detector portion made of a thermosensitive resistor film formed on said front surface of said flat substrate so as to be separated from said flow rate detector portion;
- flow rate detection and gas temperature detection electrode terminals formed on an end portion of said front surface of said flat substrate across said flow rate detector portion from said gas temperature detector portion;
- flow rate detection wiring formed on said front surface of said flat substrate so as to connect said flow rate detection electrode terminals and said flow rate detector portion;
- gas temperature detection wiring formed on said front surface of said flat substrate so as to connect said gas temperature detection electrode terminals and said gas temperature detector portion;
- and
- cavities formed from a rear surface side of said flat substrate under said flow rate detector portion and said gas temperature detector portion, respectively,
- wherein said gas temperature detection wiring is provided with:
- a first wiring portion disposed parallel to and in close proximity to said flow rate detector portion for a length substantially equivalent to a length of said flow rate detector portion;
- and
- a second wiring portion disposed so as to extend from said first wiring portion to said gas temperature detector portion,
- said first wiring portion being formed into a thicker film than said flow rate detector portion and said gas temperature detector portion.
10 more elements
A gas flow rate and temperature measuring element comprising:
- a flat substrate;
- a flow rate detector portion made of a thermosensitive resistor film formed on a front surface of said flat substrate;
- a gas temperature detector portion made of a thermosensitive resistor film formed on said front surface of said flat substrate so as to be separated from said flow rate detector portion;
- flow rate detection and gas temperature detection electrode terminals formed on an end portion of said front surface of said flat substrate across said flow rate detector portion from said gas temperature detector portion;
- flow rate detection wiring formed on said front surface of said flat substrate so as to connect said flow rate detection electrode terminals and said flow rate detector portion;
- gas temperature detection wiring formed on said front surface of said flat substrate so as to connect said gas temperature detection electrode terminals and said gas temperature detector portion;
- and
- cavities formed from a rear surface side of said flat substrate under said flow rate detector portion and said gas temperature detector portion, respectively,
- wherein said gas temperature detection wiring is provided with:
- a first wiring portion disposed parallel to and in close proximity to said flow rate detector portion for a length substantially equivalent to a length of said flow rate detector portion;
- and
- a second wiring portion disposed so as to extend from said first wiring portion to said gas temperature detector portion,
- at least a portion of said first wiring portion being constructed using a material whose electrical resistance has less temperature dependency than that of said flow rate detector portion and said gas temperature detector portion.
10 more elements
Dependencies are inferred from the claim text.